Enhancing Semiconductor Yield
with Automated LithoGraphy Simulation Workflows

In the semiconductor industry, lithography stands as a cornerstone of modern chip manufacturing, enabling the transfer of intricate patterns onto silicon wafers with nanoscale precision. As feature sizes shrink and design complexities increase, the need for accurate and efficient lithography simulations has never been greater. At Photonics Precision Engineering, we use Hyperlith™ and its Python API to optimize lithographic processes, ensuring that our clients achieve the highest standards of performance and reliability. This white paper highlights our capabilities in simulating critical lithographic quantities — such as aerial images, critical dimensions, bossung plots, process windows, and NILS — all facilitated by Hyperlith™’s advanced simulation tools. We demonstrate how automation via Hyperlith™’s Python API enhances the speed, accuracy, and scalability of these simulations, providing a robust framework for meeting the demands of cutting-edge semiconductor manufacturing.